发明名称 MANUFACTURE OF PEDESTAL OF SEMICONDUCTOR PRESSURE SENSOR
摘要 PURPOSE:To manufacture a pedestal in a mass production without damaging a metal film at cutting time by forming the film in a lattice shape at a pedestal material at which through holes are formed uniformly at a predetermined interval, and cutting the material at the groove where the film is not formed. CONSTITUTION:Through holes 12 are first formed in advance in a lattice shape to match the shape of a pedestal 11 at a pedestal material 10, and a metal film 13 is formed by screen printing in a lattice shape to include the holes 12 at the center at one side surface of the material 10. The material of the film 13 includes, for example, paste of silver, silver-palladium, silver-platinum, etc., and the film 13 is formed in the lattice shape by screen printing and baking. Thereafter, it is cut along a cutting line of one-dotted broken line. Thus, the pedestal 11 can be relatively readily manufactured in a mass production, and the film 13 is not possibly separated in this case.
申请公布号 JPS62259477(A) 申请公布日期 1987.11.11
申请号 JP19860102749 申请日期 1986.05.02
申请人 OMRON TATEISI ELECTRONICS CO 发明人 ABE ARIMASA;AOI AKIHIRO
分类号 H01L29/84;G01L9/00;G01L9/04 主分类号 H01L29/84
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