发明名称 |
Film resistor for flow measuring apparatus |
摘要 |
A film resistor for a flow measuring apparatus including: a substrate; a first insulating layer on the substrate; a platinum (Pt) pattern on the first insulating layer; and a second insulating layer on the platinum pattern. A titanium dioxide (TiO2) layer is provided between each of the first and second insulating layers and the platinum pattern.
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申请公布号 |
US4705713(A) |
申请公布日期 |
1987.11.10 |
申请号 |
US19860828451 |
申请日期 |
1986.02.11 |
申请人 |
NIPPON SOKEN, INC. |
发明人 |
OHTA, MINORU;MIURA, KAZUHIKO;ONODA, MICHITOSHI;IWASAKI, YUKIO;HATTORI, TADASHI |
分类号 |
H01C7/00;G01F1/68;G01F1/692;H01C7/02;(IPC1-7):B05D1/00;H01L29/04 |
主分类号 |
H01C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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