发明名称 Film resistor for flow measuring apparatus
摘要 A film resistor for a flow measuring apparatus including: a substrate; a first insulating layer on the substrate; a platinum (Pt) pattern on the first insulating layer; and a second insulating layer on the platinum pattern. A titanium dioxide (TiO2) layer is provided between each of the first and second insulating layers and the platinum pattern.
申请公布号 US4705713(A) 申请公布日期 1987.11.10
申请号 US19860828451 申请日期 1986.02.11
申请人 NIPPON SOKEN, INC. 发明人 OHTA, MINORU;MIURA, KAZUHIKO;ONODA, MICHITOSHI;IWASAKI, YUKIO;HATTORI, TADASHI
分类号 H01C7/00;G01F1/68;G01F1/692;H01C7/02;(IPC1-7):B05D1/00;H01L29/04 主分类号 H01C7/00
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