Apparatus for positioning a rotating element

摘要

The position of a rotating element is controlled by a galvanometer and a servo system. The position of the rotating element is determined by using a two-grating moire pattern. Movement of the element causes a projected scale image representing radiation reflected from the element to shift relative to a fixed grating thereby generating moire fringes. The accumulated fringes serve to measure absolute position and motion of the element. The servo digitally processes the measured position to generate several force components which are then combined to control the amount of force applied by the galvanometer to rotate the element.