| 摘要 |
PURPOSE:To capture the greater part of irregular reflection laser beams, and to improve the sensitivity of detection of an inspection device by converging irregular reflection laser beams by a concave mirror. CONSTITUTION:Incident laser beams 1 are projected to a semiconductor substrate 3 in a semiconductor-substrate surface inspection device, and irregular reflection laser beams 4 from the semiconductor substrate 3 are converged by a photomultiplier 5 through a concave mirror 2. Laser beams 4 converged by the concave mirror 2 are detected by the multiplier 5, and the presence of a foreign matter on the surface of the semiconductor substrate 3 is inspected. Laser beams 4 from the semiconductor substrate 3 are converged by the concave mirror 2, thus capturing the greater part of laser beams 4, thereby improving the sensitivity of detection.
|
