发明名称 |
Isolation of semiconductor contacts |
摘要 |
In a method of isolating segments of contacts on a substrate by laser scribing, a laser is directed on portions to be removed through the substrate.
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申请公布号 |
US4705698(A) |
申请公布日期 |
1987.11.10 |
申请号 |
US19860923350 |
申请日期 |
1986.10.27 |
申请人 |
CHRONAR CORPORATION |
发明人 |
VAN DINE, JOHN |
分类号 |
B23K26/00;H01L21/28;H01L27/142;(IPC1-7):B23K9/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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