| 摘要 |
<p>PURPOSE:To simplify the compensation of the displacement in the optical axis of a photoelectric element and the positioning of a focal point by fitting one end in the longitudinal direction of a piezoelectric element to a susceptor and fitting a fitting section for the photoelectric element to the piezoelectric element. CONSTITUTION:One ends of four bimorph type piezoelectric elements 3 are set up onto the inner circumferential surface of an annular susceptor 2 at regular intervals, and photoelectric elements 6 are inserted to the other ends. Piezoelectric ceramic boards 5 are laminated on both surfaces of elastic shims 4 in the piezoelectric elements 3. When drive signals having different polarity are applied to the left and right piezoelectric elements 3, the inclinations of the photoelectric elements 6 are changed. Accordingly, when positional displacements are generated in chips 6a in the photoelectric elements 6 and optical axes are tilted, the tilts of the optical axes are corrected by the piezoelectric elements 3, and beam projection 7 can be received accurately by light reception side photoelectric elements.</p> |
