| 摘要 |
PURPOSE:To maintain the pressure of fluid to be controlled at a predetermined level by controlling a piston and a valve body such that the inner pressure of a primary path is balanced with that in a control pressure chamber. CONSTITUTION:The inner pressure of a control pressure chamber 14 is maintained at an upper limit setting level through a regulating means 25 by means of a control valve 20. A piston 17 and a valve body 15 are controlled such that the inner pressure of a primary flow path 11 is balanced with that in the control pressure chamber 14. With such arrangement, the pressure of fluid to be controlled can be maintained approximately at the upper limit level.
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