| 摘要 |
There is disclosed a small-sized RF high-voltage power supply capable of stably supplying an RF high voltage to a load at the maximum power efficiency, even if the load has a nonlinear electrostatic capacity that varies with the applied voltage. The power supply has an RF step-up transformer equipped with a primary winding having a tap to which one end of a power capacitor is connected. An oscillating inductor, a thyristor, and the other end of the power capacitor are connected in series with each end of the primary winding in this order. Each thyristor conducts when a voltage is applied to it from the corresponding end of the primary winding. A diode is connected in antiparallel with each thyristor. The thyristors are alternately triggered to conducting state.
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