| 摘要 |
PURPOSE:To improve the efficiency in the production of chlorosilanee by crushing silicon in water, and passing gaseous chlorine through the particles to enhance the contact efficiency between the silicon particles and gaseous chlorine. CONSTITUTION:Metallic silicon is charged in a mortar, etc., added with water, and crushed to 1mum-2mm mean particle diameter. The particles are packed in a reaction tube, etc., in a nonoxidizing atmosphere, and heated to evaporate and remove water. Gaseous chlorine is then supplied at 140-300 deg.C, hence chlorine reacts with silicon, and the silicon particles are chlorinated. The formation of by-products is reduced by this method, and chlorosilanes (SinCl2n+2, where n>=2) can be produced with high efficiency.
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