| 摘要 |
PURPOSE:To obtain a wide scanning wavelength, by simple constitution such that electrodes are arranged to the opposed surfaces of a cavity type Fabry- Perot interferometer and changing the distance between reflecting mirrors by the electrostatic attraction force between the counter electrodes. CONSTITUTION:Metal reflecting films 11, 21 are provided to light pervious substrates 10, 20 by vapor deposition and both substrates 10, 20 are bonded through a spacer 30. A cavity Fabry-Perot interferometer is made of the opposed reflecting films 11, 21. The metal reflecting films 11, 21 also act as electrodes and are connected to a power source 50. The electrodes are formed to both surfaces forming a cavity and the cavity interval changes by the electrostatic attraction force between the electrodes.
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