| 摘要 |
PURPOSE:To safely carry out continuous plating by vacuum deposition with satisfactory adhesion by placing a gas feed line in an evacuation line besides a gas circulation line so as to temporarily feed gas to a buffer tank at the beginning of the operation of an evacuation system. CONSTITUTION:Gaseous N2 in an inlet side seal roll chamber 11 and an outlet side seal roll chamber 13 is sucked into a suffer tank 5 with vacuum pumps 1, compressed with a root blower 2 and returned to the chambers 11, 13 through a purifier 3. At this time, a gas feed line 9 is placed besides the gas circulation line so as to temporarily feed gas to the buffer tank 5 at the beginning of the operation of the evacuation system. Thus, the internal pressure of the tank 5 can be surely prevented from being made negative.
|
