发明名称 NOVEL PHOTOSENSITIVE RESIN COMPOSITION
摘要 PURPOSE:To obtain a compsn. having resilience, good film formability, good adhesiveness and excellent acid resistance by incorporating a specific resin and the specific sodium or potassium salt of 4, 4'-diazide stilbene-2, 2'-disulfonic acid as essential components into said compsn. CONSTITUTION:This compsn. contains the resin expressed by the formula I and the sodium or potassium salt of 4, 4'-diazide stilbene-2, 2'-disulfonic acid expressed by the formula II as the essential component. In the formula I, X is an org. acid when X exists, Y is the carbon-carbon double bond-contg. group expressed by -OCH2CH=CH2, etc., n is >=10 integer, j is the number to satisfy 0<j<1, t denotes 0 or 1 integer. In the formula II, Z denotes a sodium atom or potassium atom.
申请公布号 JPS62257147(A) 申请公布日期 1987.11.09
申请号 JP19860100467 申请日期 1986.04.30
申请人 NITTO BOSEKI CO LTD 发明人 SERIZAWA HAJIME;KOJIMA KOICHI;SHIMIZU SEI
分类号 G03F7/038;G03F7/004;G03F7/008;G03F7/012;G03F7/031;H01L21/027 主分类号 G03F7/038
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