| 摘要 |
PURPOSE:To highly precisely set the track width and interval of the gap section of a thin-film magnetic head so as to improve the yield and reliability, by forming a gap forming film at the section which is formed by removing an insulating film and a magnetic film in such a way that the magnetic film is buried through the gap forming film. CONSTITUTION:A magnetic film 2 is formed on a base plate 1 by sputtering, etc., and an insulating film 8 is formed on the film 2 by sputtering, etc. After forming a winding film 4 and insulating film 5 successively, a photoresist 9 and an insulating film removed section 8a which is used for forming a magnetic gap and has a width (W) are formed. Then a gap forming film 3 is formed by sputtering, etc., after removing the photoresist 9 and a magnetic film 6 is formed by sputtering, etc. After forming the magnetic film 6, the remaining photoresist 9 is removed by leaving the film 6 in the insulating film removed section 8a only. When such manufacturing processes are applied, the gap width and track interval can highly precisely be worked and set and, as a result, the yield and reliability can be improved.
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