| 摘要 |
PURPOSE:To detect a sediment with high accuracy and at high speed by generating a secondary product by locally heating an atmosphere, and causing light beams from a light source reflected, for example, from the sediment of this secondary product. CONSTITUTION:A heater 3 is heated and heats an atmosphere of the periphery, and as a result, a substance existing in the atmosphere is also heated and a secondary product is generated by causing a thermal decomposition, and a sediment 5 is sedimented on a substrate 1 of the periphery of the heater 3 or the surface of an insulating layer 2. In this case, the heater 3 is in a high temperature state and the sediment 5 scarcely exists, but the heater 3 is formed on a bridge structure 2a, and its heat capacity is small, therefore, the insulating layer 2 of the periphery of the heater 3 and the substrate 1 are maintained in a fairly lower temperature state than the heater 3. Accordingly, a substance in the atmosphere which has been heated locally by the heater 3 is sedimented as the sediment 5 on the insulating layer 2 of the periphery of the heater and the surface of the substrate 1. In this sate, a light beam from a light source is reflected by the sediment 5, and by monitoring the reflected light, it is detected that the sediment 5 has been sedimented.
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