| 摘要 |
PURPOSE:To automatically peel a photo mask and a negative by evacuating a space, where a holding member of the photo mask and that of the negative face each other, to attract and fix respective substrates to these members and releasing the vacuum of the space in this state. CONSTITUTION:A photo mask 5 is held on a holder 11, and a negative 6 is held on a holder 13. Vacuum chambers 18A and 18B are formed in holders 11 and 13 respectively and are provided with seal members 16 and 19, and the photo mask 5 and the negative 6 are held by seal members 16 and 19. The photo mask 5 and the negative 6 are matched to each other, and vacuum chambers 18A and 18B are made vacuous to attract and fix the photo mask 5 and the negative 6 to holders 11 and 13. The part between the photo mask 5 and the negative 6 is evacuated to closely bring them into contact with each other by attraction. A light L is projected to expose the negative 6. Thereafter, the vacuum between the photo mask 5 and the negative 6 is released to peel the photo mask 5 and the negative 6. Since the photo mask 5 and the negative 6 are automatically peeled, the productivity is improved. |
