| 摘要 |
PURPOSE:To attain an easy and highly reliable inspection by loading a fiber scope on a probe plate. CONSTITUTION:Matching marks 13 and 13' on a fine line substrate 1 at fiber scopes 10 and 10' to load a probe flat plate 4' are stored in the memory of a computer as a template pattern. At the time of positioning, the similarity of a binarization image obtained by the input from the first matching mark 13 and a template pattern stored already into the memory is investigated and the best matched point is discovered by the action of an XYtheta table 11. Next, the collation with the mark 13' is executed and in such a same way, the best matched point is found out. Distances d13, 13' of two points and inclinations theta13,13' obtained in such a way are counted, when it is close to the parameter of said substrate 1' stored in a computer 7 beforehand, it is considered that the matching marks 13 and 13' are determined correctly and the position is counted. Thereafter, the probe flat plate is descended and the substrate 1' is inspected. |
