| 摘要 |
PURPOSE:To accurately position an X-Y stage at a high speed by separating a control circuit and an actuator at high speed moving time and finely positioning time of a table. CONSTITUTION:A deviation (e) between a target value obtained from a target value generator 24 and a present position of a table of an output from a displacement detector 25 is obtained by a comparator 26. When this deviation (e) is larger than a certain set value, a control type switching circuit 23 selects a high speed moving control circuit 21 and coils 13a-13c connected to the circuit 21 to approach the table to the vicinity of the target value with a large thrust in a short time. When the deviation (e) between the target value and the present value becomes smaller than the certain set value, the switching circuit 23 selects a finely positioning control circuit 22 to supply a current to finely positioning coils 14a-14c. |
