A CRYOPANEL AND A CRYOPUMP USING SUCH CRYOPANELS

摘要

A cryopump of vertically tiered individual generally conical shaped sections with linearly increasing base diameters arranged smaller to larger base diameter as the distance increases from the coldest end of elongated refrigeration source. Individual cryopanels are a surface of revolution with tapered bayonet joint interlocking portions to permit ease of assembly while maintaining good thermal contact between sections.