发明名称 Mos type integrated semiconductor device with nonuniform thickness of gate oxide and process for fabricating it.
摘要 <p>In an integrated MOS device, MOS transistors belonging to circuit sections destined to operate at different voltages are provided with an insulating layer of gate oxide of thickness suitably differentiated through a modification of known fabrication processes, increasing it in the case of transistors subject to higher supply voltages.</p>
申请公布号 EP0244367(A2) 申请公布日期 1987.11.04
申请号 EP19870830113 申请日期 1987.03.25
申请人 SGS MICROELETTRONICA S.P.A. 发明人 PICCO, PAOLO;CAVIONI, TIZIANA;MAURELLI, ALFONSO
分类号 H01L21/8247;H01L21/8234;H01L27/088;H01L29/78;H01L29/788;H01L29/792 主分类号 H01L21/8247
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