| 摘要 |
PURPOSE:To improve the adhesiveness between an electroforming nickel layer and glass master disk by forming a thick resist film near a central axial hole. CONSTITUTION:A primer 2 is treated on the glass master disk 1 and a positive type resist layer 3 is formed thereon. A mask 4 to cut a UV wavelength region is set on the central axial hole and the resist is exposed. Post-baking after development yields the glass master disk having the resist layer remaining only near the central axial hole. The part on the glass master disk where the resist is removed is wiped, then a primer treatment 5 is executed again and a resist 6 is formed to a prescribed film thickness. Prebaking, cutting, developing, post-baking, conducting treatment and electroforming of nickel are thereafter executed.
|
