发明名称 Method for forming crystal and crystal article obtained by said method.
摘要 A method for forming a crystal, which comprises applying a crystal forming treatment on a substrate having a free surface on which a deposition surface (SNDS) with a small nucleation density and a deposition surface (SNDL) having a sufficinetly small area for crystal growth only from a single nucleus and having a greater nucleation density (NDL) than the nucleation density (NDS) of said deposition surface (SNDS) are arranged adjacent to each other, thereby growing a single crystal from said single nucleus.
申请公布号 EP0244081(A1) 申请公布日期 1987.11.04
申请号 EP19870302587 申请日期 1987.03.25
申请人 CANON KABUSHIKI KAISHA 发明人 YONEHARA, TAKAO;NARUSE, YASUHIRO
分类号 H01L21/205;C30B23/02;C30B25/02;C30B25/10;C30B25/18;H01L21/20;H01L21/84;H01L29/78;H01L29/786 主分类号 H01L21/205
代理机构 代理人
主权项
地址
您可能感兴趣的专利