| 摘要 |
PURPOSE:To take a high-accuracy measurement without reference to the experience and skillfulness of an operator by detecting variation in the temperature of a metallic block by a beam irradiating means. CONSTITUTION:For example, a copper block 6 of 5mm in side length is placed on a graphite plate 7 which is 50mm thick and 200mm square and oscillation widths of 150mm in two X and Y directions are measured at the same time. Further, an alumel and chromel thermocouple 2 are buried in the copper block 6, whose temperature is measured. Then, a beam source 4 and the graphite plate 7 are set at a distance of 1m and the numbers of times of oscillation in the X- and Y-axial directions are both set to 500Hz. Electron beam oscillation is performed by connecting the output of a function generator to a control circuit for an electron beam deflecting coil. Further, the output is adjusted during measuring operation so that the copper block 6 is not fused by beam irradiation. When a rise in the temperature of the copper block 6 which is detected by the thermocoupler 2 is detected, desired oscillation width are measured. |
