| 摘要 |
PURPOSE:To enable the absolute position of high precision to be controlled, by moving a moving member with selective feed to piezoelectric plates, and by detecting the moving direction of the moving member with signal from the then linear encoder or controlling the absolute position of the moving member. CONSTITUTION:By each pair of first piezoelectric plates 1a and 2a, 1b and 2b, a moving member 5 is clamped or released along with the application or release of voltage. Besides, by each pair of second piezoelectric plates 1c and 2c, 1d and 2d, the moving rod 5 is longitudinally moved with the application or release of voltage. On the moving rod 5, a slit section with a plurality of slits arranged longitudinally in parallel with each other at given intervals is formed, and a linear encoder is composed of the slit section, a light-generating element 8, and a photodector 9. By signal from the linear encoder, the moving direction of the moving rod 5 is detected, and the absolute position of the moving rod 5 is controlled. |
