发明名称 ASCENDING AND DESCENDING GUIDE MECHANISM FOR SPECIMEN STAGE
摘要 PURPOSE:To stabilize the ascending and descending operation of a specimen stage by fitting a guide member with a substantially semicircular section between recessed groove guides and plane guides, applying a pressure from an outer frame to press the plane guides of a sliding shaft and fitting the guide member to the side of an inner surface. CONSTITUTION:Recessed groove guides 16, 16... with substantially semicircular sections are formed in a vertical direction in the inner circumferential surface of an outer frame 15 in the angular positions corresponding to plane guides 9, 9... formed on the outer circumferential surface of a sliding shaft 3. A guide member 17 with a substantially semicircular section is fitted between grooves 16 and planes 9. By applying a pressure to the member 17 from the outer frame 15 to press the member 17 against the planes 9, the member 17 can be fitted to the side of the inner circumferential surface of the outer frame 15. Accordingly, the wall thickness of the outer frame 15 in its circumferential direction becomes approximately constant over the whole circumference of the frame and the rigidity of an ascending and descending mechanism can be increased as a whole to stabilize the ascending and descending operation of a specimen stage 2.
申请公布号 JPS62250342(A) 申请公布日期 1987.10.31
申请号 JP19860093410 申请日期 1986.04.24
申请人 HITACHI ELECTRONICS ENG CO LTD 发明人 CHIKAMATSU SHUICHI;HACHITANI MASAYUKI
分类号 H01L21/68;G01N21/84;G01N21/88;G01N21/956;H01L21/67 主分类号 H01L21/68
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