| 摘要 |
<p>PURPOSE:To adjust sensitivity, by a method wherein acceleration is preliminarily acted by applying vibration to a sensor element in the deflecting direction of a piezoelectric vibrator for detection and the free end of a high sensitivity element is cut using laser. CONSTITUTION:A detection signal is taken out as the output of flexural oscillation of piezoelectric bimorph elements 1 for detection when the joints 4 of said elements 1 are set as support points. At this time, because Coriolis forces are different by 180 deg. in a drive vector direction, said piezoelectric bimorph elements 1 are deflected to reverse directions. Therefore, the piezoelectric bimorph elements 1 for detection are connected so that the signals thereof are taken out as a sum signal. A sensor is preliminarily vibrated to an input acceleration direction by a vibrator and, in order to set acceleration output due to sensitivity difference to zero by tuning, the electrodes 5 at the free ends of the piezoelectric bimorph elements for detection are cut or removed by laser until output comes to zero with respect to input acceleration to regulate the sensitivity difference between left and right. By this method, the sensitivity to acceleration due to usual assembling can be improved by 30-40dB.</p> |
