| 摘要 |
PURPOSE:To enable the quantity of a specimen solution and the size of an analyzer to be reduced by providing a specimen groove in a semiconductor substrate with a sensitive electrode, accommodating a silver or silver chloride electrode in a reference groove and arranging a bridge mechanism for generating an ionic conductivity between both the grooves. CONSTITUTION:A specimen groove 2 for holding a specimen solution and a reference groove 3 for a reference electrode are formed in the surface of an Si substrate 1. The specimen solution and a saturated potassium chloride aqueous solution are dropped in the specimen groove 2 and the reference groove 3, respectively. An ion sensitive film 4 is supplied to the whole surface of the groove 2 and a conductive electrode (Ti with its surface coated by an oxide film, or the like) 5 is wired under the groove 2. A reference electrode 10 covered by a silver chloride film is wired to the reference groove 3 and a prescribed potential is applied thereto via a pad 11. Ions are freely movable between the potassium chloride solution and the specimen solution by a bridge mechanism 12 provided between the grooves 2 and 3. A film potential changes in accordance with the density of the ions to be measured in the specimen solution and is transmitted to the gate of an FET6 by the electrode 5 to be detected.
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