| 摘要 |
<p>PURPOSE:To improve the efficiency of a storage space, and to prevent the adhesion of a foreign matter onto a thin plate by storing the thin plate taken out of a case under an upright state in the atmosphere of a clean air flow. CONSTITUTION:Mask storage shelves 2, a mask carrying mechanism 3, a mask holding mechanism 4, and a foreign-matter removing mechanism 5 (not shown) and a foreign-matter inspection mechanism 6 (not shown) each mounted into two cases 501 in the vertical direction are installed into a chamber 10 for a mask storage warehouse 1. An open-close door 10b is fitted to an opposed-side opening section 10a to the mask storage shelves 2, and a clean air unit 11 for reducing probability, in which foreign matters 14 adhere on masks 13 in the chamber 10, particularly, the mask storage shelves 2, is set up at the upper position of the mask storage shelves 2. Accordingly, the thin plates 2 are stored under an upright state in which they are extracted from the cases, thus improv ing the efficiency of a storage space, then preventing the adhesion of foreign matters on the thin plates 2.</p> |
