| 摘要 |
PURPOSE:To uniformly coat the inside of a plastic pipe by plasma polymn. by introducing a polymerizable gas into the central part of the pipe in a direction parallel to the pipe and by causing electric discharge among electrodes for impressing high voltage and earthed electrodes arranged alternately along the pipe. CONSTITUTION:A PVC pipe 7 is placed in a reaction tube 1, the tube 1 is evacuated to a prescribed degree of vacuum and a polymerizable gas such as tetramethylsilane is introduced into the pipe 7 to regulate the degree of vacuum. A prescribed high frequency is then impressed among electrodes 5 for impressing high voltage and earthed electrodes 6 arranged alternately along the tube 1. Thus, the polymerizable gas is uniformly distributed and a uniform plasma discharge state is obtd., so the thickness distribution of a coating film can be uniformized.
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