发明名称 MANUFACTURE OF OPTICAL SENSOR
摘要 PURPOSE:To increase a gamma-value without delaying a response speed by forming a thin film consisting of a solid solution CdSCdSe on an insulating substrate and exposing this thin film to a vapor of CdC-l at high temperature to activate it photoelectrically and irradiating it with a light above a specified quantity and forming an opposite electrode after that. CONSTITUTION:On an insulating substrate 1, a thin film 6 consisting of CdS, CdSe or their solid solution CdS-CdSe is formed and this film 6 is exposed to a vapor of CdCl2 at high temperature to be activated photoelectrically, after which the film 6 is irradiated with a light above a specified quantity. After that, an opposite electrode is formed and further a protective film 7 is formed. As a result, it becomes possible to increase a gamma-value without damaging the goodness of a photoconductive type optical sensor that a photocurrent value is large and without delaying an optical response speed of the above photocurrent.
申请公布号 JPS62247564(A) 申请公布日期 1987.10.28
申请号 JP19860090435 申请日期 1986.04.18
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 IKEDA KOSUKE;WADA HIROKO;YOSHIGAMI NOBORU
分类号 H01L27/146 主分类号 H01L27/146
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