| 摘要 |
PURPOSE:To obtain a hard diamond-like carbon film having high electric resistance by bringing a gaseous mixture composed of an oxygen-contg. compd. contg. O, C and H and diluting gas into reaction and depositing the same on a substrate at a specific temp. CONSTITUTION:The gaseous mixture composed of the oxygen-contg. compd. contg. oxygen, carbon and hydrogen and diluting gas is deposited on the substrate, by which the objective carbon film is obtd. The resultant diamond-like carbon is the film which consists essentially of carbon and has 2,000-7,000kg/mm<2> Vickers hardness and >=10<10>OMEGAcm electric resistance. The oxygen-contg. compd. to be used is preferably supplied in an extremely fine state, more preferably in a gaseous state and the compd. of <=15C is more preferable in terms of ease of handling in particular. A method for converting the gaseous mixture to plasma by a low frequency of <=300kHz, high frequencies of 300kHz-300MHz, or microwaves of 300MHz-1,000GHz or the like is used as a means for bringing the gaseous mixture into reaction.
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