发明名称 MANUFACTURE OF OPTICAL SENSOR
摘要 PURPOSE:To increase a gamma-value without delaying a response speed by forming a thin film consisting of a solid solution CdS-CdSe on an insulating substrate and forming an opposite electrode after activating said thin film photoelectrically and further forming a protective film and irradiating a photosensor with a light of above a specified quantity at high temperature before forming front and rear protective films. CONSTITUTION:On an insulating substrate 1, a thin film 6 consisting of CdS, CdSe or a their solid solution CdS-CdSe is formed and this film 6 is exposed to a vapor of CdCl2 at high temperature to be activated photoelectrically, after which an opposite electrode is formed. Then, after forming the opposite electrode and before forming a protective film 7, this substrate is irradiated with a light above a specified quantity. As a result, it becomes possible to increase a gamma-value without damaging the goodness of a photoconductive type optical sensor that a photocurrent value is large and without delaying an optical response speed of the above photocurrent.
申请公布号 JPS62247565(A) 申请公布日期 1987.10.28
申请号 JP19860090441 申请日期 1986.04.18
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 WADA HIROKO;IKEDA KOSUKE;YOSHIGAMI NOBORU
分类号 H01L27/146 主分类号 H01L27/146
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