| 摘要 |
PURPOSE:To achieve a smaller size along with compactization, by constructing a tuning circuit, an arithmetic unit, a display and a recorder integral with a rotary disc and a detector section. CONSTITUTION:Radiated light 3 from a plasma 2 generated within a plasma- applied unit 1 is sampled with an optical fiber 6 fixed in a hood 5 to be introduced to a rotary disc 8 provided with a plurality of interference filters 7a-7d varied in the transmission wavelength at an equal interval on a concentric circle, where the light is analyzed with the separate interference filters to detect intensities of light for respective transmission wavelengths with a photoelectric multiplier 9. An output from the photomultiplier 9 is applied to a peak holding circuit 12 after amplification with an amplifier 11 and processed with a tuning circuit 13 and an A/D converter 14. Then, an operational circuit 15 computes the ratio of signal intensity with the beams of transmission light from other interference filters 7b-7d based on the signal intensity of the beam of transmission light from the interference filter 7a as reference. The results of the computation are shown on a display 16 while being recorded on a recorder 17.
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