| 摘要 |
PURPOSE:To enable simultaneous execution of an AC test, a digital function test and a DC test for a DUT as required, by arranging two test heads for giving and taking signals between a semiconductor device to be tested and a measuring module as opposed to each other sanwiching the semiconductor device being tested from both sides thereof. CONSTITUTION:Ends of measuring pins 5 and 6 which separate from a pin P of a DUT 1 while no measurement is done is driven selectively with an actuator to contact the pin P corresponding to the DUT when a measurement is carried out. Here, when attentions are paid to the length of the measuring pins 5 and 6, the measuring pin 5 of a test head 2 becomes shorter than the measuring pin 6 of a test head 3. In this case, the test head 2 is used to perform an AC test while the test head 3 is used to perform a DC test and a digital function test. This can reduce the distance between a measuring module of a high frequency signal and the DUT 1 thereby achieving a higher accuracy.
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