| 摘要 |
PURPOSE:To provide a vacuum deposition device which permits taking of a vapor source unit out of a vacuum vessel and cleaning the unit by mounting the vapor source units respectively provided with vapor sources, antisticking plates and masks on both ends of traveling carriages and selectively using the units. CONSTITUTION:The travelling carriages 3, 13 are advanced on rails 2, 12 and a hermetic wall 18b in a vapor source unit supporting frame body 18 is pressed to a vacuum vessel wall 11 to hermetically close a feed port 19. The inside of the vacuum vessel 1 is then evacuated. The supporting frame 25 is raised in this state and the antisticking plate 23 and mask 24 are brought to the prescribed positions. On the other hand, a power source changeover device 30 is lifted and is connected to a connecting terminal part 28 provided to the supporting frame body 18 to electrically heat the vapor unit; at the same time, cooling water 20 is supplied 29 to make the required vapor deposition operation. The power source is interrupted upon ending of a series of the vapor deposition operations. The inside of the vessel 1 is opened to the atm. and the supporting frame 25 is lowered onto the supporting frame body 18 and is transferred to a halt position to be ready for the next use. On the other hand, the vapor source unit on the vapor source unit supporting frame body 17 under preparation existing in the halt position is used in turn.
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