ZINC SULFIDE SPUTTERING TARGET AND ITS MANUFACTURE

摘要

PURPOSE:To obtain the titled sputtering target forming a thin film having the same composition as the target and withstanding a thermal shock during sputtering by hot pressing hot press carbon dies contg. zinc sulfide powder in a heating furnace to sinter the powder. CONSTITUTION:Zinc sulfide powder is filled into hot press carbon dies. The powder may contain impurities which are active under fluorescence. The dies are put in a heating furnace and hot pressed in the air at 800-1,200 deg.C under 10- 100kg/cm<2> pressure to convert the material in the dies into ceramics by sintering. By this method a zinc sulfide sputtering target forming a thin film having the same composition as the target is obtd. The target and a formed thin film undergo no change in the composition with the lapse of time.