发明名称 |
Method of making a nonplanar buried-heterostructure distributed-feedback laser |
摘要 |
A buried-heterostructure distributed feedback laser is described, including a grating structure at a surface of a nonplanar cladding layer. The grating structure can be made by transfer of a pattern by ion milling, the pattern being defined in an ion-beam resist layer, e.g., by direct-writing electron-beam exposure. Low-threshold, high-power lasers are obtained with a commercially favorable yield.
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申请公布号 |
US4701995(A) |
申请公布日期 |
1987.10.27 |
申请号 |
US19860924518 |
申请日期 |
1986.10.29 |
申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY, AT&T BELL LABORATORIES |
发明人 |
DOLAN, GERALD J.;LOGAN, RALPH A.;TEMKIN, HENRYK;WILT, DANIEL P. |
分类号 |
H01L21/302;H01L21/3065;H01S5/00;H01S5/12;H01S5/227;(IPC1-7):H01L21/66;H01L21/208;H01L21/36;H01S3/19 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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