摘要 |
A Faraday cup adapted for measuring the energy density of an electron beam which scans the cup and is of generally strip-shaped cross section, includes a substrate having a cavity in a surface thereof, a layer of electrically conductive material next adjacent to and conforming to the surface of the substrate, a layer of electrically isolating material having an aperture extending therethrough above the cavity and being substantially level and next adjacent to the layer of electrically conductive material except at margins of the aperture where the layer of electrically isolating material overhangs the cavity, and a metallic layer next adjacent to said layer of electrically isolating material and which has an opening aligned above said aperture and having a maximum dimension less than the width of the strip-shaped cross section of the beam at a location along the latter where the beam scans the cup.
|