PRODUCTION OF MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To provide substantially desired durability to the titled medium even if the thickness of a plasma-polymerized film is <=100Angstrom by forming the plasma- polymerized film on the surface of the thin ferromagnetic metallic film under the conditions under which the competitive ratio of etching and film formation changes continuously. CONSTITUTION:A substrate film formed with the thin ferromagnetic metallic film 2 by vapor deposition of Co-Ni on a PE terephthalate film 1 is mounted to a delivery shaft 18. The radius of curvature and arc length of discharge electrodes 21-23 are respectively determined and the electrodes are excited by respective high frequencies. A tetramethoxysilane is used as a gaseous monomer and gaseous argon is used as a carrier gas and the discharge is executed at the throwing electric power of the values respectively determined by high-frequency power source 24, 26. Etching arises substantially and the surface is cleaned in a chamber A where the plasma polymn. process is about the extent considered to be approximate to a monolayer. The formation of the plasma-polymerized film is more dominant than the etching as the film transfers into the chamber B and chamber C. The plasma-polymerized film contg. the tetramethoxysilane as a starting material is finally formed on the thin ferromagnetic metallic film and thereafter the film is made into a magnetic tape, by which the magnetic tape is obtd.