发明名称 VERTICAL TYPE TREATING APPARATUS
摘要 PURPOSE:To facilitate maintenance and to obtain stable treating temperature, by feeding treating fluid from the bottom part of a treating space, lowering the treating fluid, which is lifted in the treating space, through a discharge space, and discharging the fluid through the bottom part. CONSTITUTION:In a vertical type treating apparatus 1, reacting tubes comprising an inner tube and an outer tubes are formed. The upper end of the inner tube is opened. A treating space 3 is formed by a part surrounded by the inner wall surface of the inner tube. The upper part of the outer tube is closed. A discharge space 4 is formed by a part surrounded by the outer wall surface of the inner tube and the inner wall surface of the outer tube. A heater 14 is provided so as to surround the outer tube around the outer wall surface of the outer tube. The heater 14 is divided into the following parts: a soaking region C formed at the central part; an auxiliary region U formed at the upper end; and an auxiliary region L formed at the lower end. Treating fluid 11 is supplied from the bottom part of the space 3. The fluid 11, which is lifted in the space 3, is lowered in the space 4 and discharged to the outside through the bottom part of the space 4. Thus, maintainance can be performed readily, and the stable treating temperature can be realized in a short time.
申请公布号 JPS62245624(A) 申请公布日期 1987.10.26
申请号 JP19860087941 申请日期 1986.04.18
申请人 HITACHI LTD 发明人 TAKAGAKI TETSUYA;NISHIZUKA HIROSHI;UCHINO TOSHIYUKI;TORII TAKUJI
分类号 H01L21/205;H01L21/22;H01L21/31 主分类号 H01L21/205
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