THIN FILM SYNTHESIZING DEVICE

摘要

PURPOSE:To improve ionization efficiency and to improve film growing speed by providing a means for generating a vertical magnetic field to a gas ionized by the thermions in the progressing direction of the ions. CONSTITUTION:A gaseous raw material such as gaseous methane is ionized by the thermions released from a filament 5 and the ions are pulled up by a bias cathode 4 when said gaseous raw material is released from a gas blow pipe 10. The ions pass the magnetic field formed by a center magnet 7, an outer magnet 6, and an upper magnet 3 in the process of such pulling up. The magnetic filed is so set as to cross the progressing direction of the ions so that the intensity of the magnetic field acts effectively as it is in a radial direction. The spiral motion of the ions are, therefore, maximized and the ionization efficiency is improved. The formed ions are attracted to a cathode electrode 2 and the desired carbon film or the like is deposited on a substrate 1.