摘要 |
PURPOSE:To enlarge and project the image of an object to be inspected, and to obtain brightly and distinctly the image by an optional enlargement ratio it, by irradiating the object to be inspected by parallel rays, making transmission light or reflected light which is obtained transmit through a square-law refractive index distribution cylindrical lens, and emitting it at a prescribed angular aperture through a beam waist. CONSTITUTION:Parallel rays 5 are emitted from a light source 1 such as a laser and halogen lamp, etc., transmit through a square-law refractive index distribution cylindrical lens 2, emitted at an annular aperture 2theta through a beam waste in its focal position, and irradiated to a screen being in a position separated by a distance L from the beam waist 6. The square-law refractive index distribution cylindrical lens 2 which is used in such a case is a small-sized one whose length and diameter are 2-3mm, and about a little under 2mm, respectively, and having a focal distance of about 1-2mm is suitable.
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