| 摘要 |
PURPOSE:To detect both an internal defect and a surface defect of a material to be inspected by providing a sensor with ultrasonic vibrators and an infrared detector and using both ultrasonic waves and light. CONSTITUTION:The sensor 11 which has a space part A in the center is provided with plural ultrasonic vibrators 12 arrayed in a plane opposite the material 4 to be inspected which moves in a line. Further, the infrared detector 15 which photodetects radiant infrared rays from the material 4 to be inspected which is heated by a heater 7 is provided at the space part A. Then, electric pulses are supplied to the ultrasonic vibrators 12 from a transmission part 2, and echo signals from the object material 4 are detected by the ultrasonic vibrators 12, whose reception signals are inputted to an internal defect detection part 6 through a reception part 5 to detect the internal defect of the object material 4. The infrared detector 15 which photodetects the radiant infrared rays from the heated surface of the objective material 4, on the other hand, inputs its output signal to a surface detect detection part 17 after amplification 16, and the signal is processed to detect the surface defect of the objective material 4.
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