| 摘要 |
PURPOSE:To completely prevent the incident stray light on the sides of detective elements from entering thereinto while facilitating the formation of elements by a method wherein a cold aperture is made of Si material to cover the sides of respective elements while the overall surface of Si material is coated with no-reflection material. CONSTITUTION:One side of cold aperture 7 made of Si material is etched by the depth G. Next, light transmitting parts 8 in size of A, B are provided on the reflection surface and then Si is taper-etched using the surface direction taking the size of C1, C2 to form the light transmitting parts 8. These light transmitting parts 8 are provided corresponding to the arrayal of elements while the photodetecting surfaces of elements are inserted into the light transmitting parts 8. Through these procedures, the sides of elements are covered with the aperture 7 so that the stray light incident on the elements may be absorbed into the no-reflection material coated on the aperture 7 to prevent the noise due to stray light from being generated. |
