| 摘要 |
PURPOSE:To improve the reliability and forming efficiency of a medium without spoiling the magnetic characteristics of a Co alloy magnetic layer by forming a nonmagnetic substrate layer having excellent mechanical strength and using thermally stable aluminum nitride (AlN) as a nonmagnetic material. CONSTITUTION:This medium is formed by using the thin film of the aluminum nitride (AlN) having the high mechanical strength and the excellent thermal stability as the nonmagnetic material for the nonmagnetic substrate layer 2. More specifically, the AlN is formed by sputtering as the nonmagnetic substrate layer 2 on the nonmagnetic alloy substrate 1 subjected to mirror finishing and thereafter an underlying layer 3 is laminated and formed in succession thereof continuously by sputtering Cr within the same vessel thereon, then a magnetic layer 4 by sputtering Co alloy and finally a protective lubricating layer 5 by sputtering C. The staining of the respective layer surfaces is thereby thoroughly prevented and the need for surface polishing is eliminated, by which the man- hours thereof are reduced and the forming efficiency is improved.
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