| 摘要 |
PURPOSE:To enable a wafer to be washed up thoroughly without being dried up during the displacement of basket being exposed to no atmosphere while avoiding any dirt sticked to the wafer by a method wherein the wafer contained in a submerged basket is shifted to another submerged basket. CONSTITUTION:A shifting hand 14 with a basket B3 placed looking downward rises upward, goes leftward and falls downward while pressing down a setting base l0a by a pressing down bolt 56. At this time, a wafer W left on a mounting base 6a above a fixed base 8a is temporarily contained in the basket B3. Next, after closing a switch shaft 20, the shifting hand 14 rises upward around 10 mm, goes rightward and falls downward. Finally, the switch shaft 20 is opened while the shifting hand 14 and another setting base 10b are simultaneously lifted so that the wafer W left on another mounting base 6b above another fixed base 8b may be contained in another basket B2.
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