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发明名称
摘要
申请公布号
JPS62166652(U)
申请公布日期
1987.10.22
申请号
JP19860053997U
申请日期
1986.04.10
申请人
发明人
分类号
H01L29/41;H01L21/338;H01L29/80;H01L29/812;(IPC1-7):H01L29/80;H01L29/60
主分类号
H01L29/41
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