| 摘要 |
PURPOSE:To obtain a waveguide type optical element with a decreased propagation loss by using arsenic sulfide glass as a vapor source or sputtering source and forming a thin chalcogenide glass on a substrate material. CONSTITUTION:As2S3 among various kinds of the chalcogenide glass is particularly good in the optical transmission characteristic in a visible region and near IR region. The arsenic sulfide glass expressed by As2Sx (x=3.1-3.8) is used as a vapor deposition source or sputtering source for obtaining the thin film for the waveguide. The arsenic sulfide glass is obtd. by subjecting a quartz glass tube compounded with a prescribed ratio of high-purity simple substances of arsenic and sulfur to vacuum sealing, then putting the tube in an oscillatable electric oven, resting the tube in the oven at 600-850 deg.C to effect the reaction of the arsenic and sulfur and finally subjecting the same together with the glass tube to quick cooling in water. The thin arsenic sulfide film 3 formed on the substrate 1 is inherently the optical waveguide of a slab type and is, therefore, usable as various kinds of optical elements. The uniform thin film is thereby obtd. and the waveguide type element having the small propagation loss is formed. |
