| 摘要 |
PURPOSE:To make it possible to perform automatic focusing regardless of a form of a sample surface by driving the sample stage in comparing the stored quantity of electricity with the signal obtained in detecting the marker image projected on the sample surface with a monitor camera. CONSTITUTION:A maker plate provided with a marker is arranged inside an optical microscope 20 to be used for an X-ray microanalyzer or the like, and the marker image is projected on a sample and the projected image is inputted to the monitor camera 21 through a reflection mirror or a semitransparent mirror. Then, the peak value or the like which changes corresponding to a focusing degree is obtained in detecting the image signal by the detection circuit 22 and it is stored in the CPU 23. Then, it is compared with a quantity of electricity which has been stored previously, and the output of comparison drives the stage through a motor 25 and adjusts the height of a sample. Accordingly, even when the sample surface is of mirror-like finish or the like on which contrast is hard to be formed, automatic focusing can be easily performed. |
