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发明名称
VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERANORDNUNG
摘要
申请公布号
DD250808(A1)
申请公布日期
1987.10.21
申请号
DD19860291981
申请日期
1986.07.01
申请人
VEB MIKROELEKTRONIK "KARL MARX" ERFURT,DD
发明人
CATTUS,GERHARD,DD;PETERSEIM,ERHARD,DD;FROEHLICH,MANFRED,DD;BOEHMER,KARL-HEINZ,DD
分类号
H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
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