| 摘要 |
PURPOSE:To widen a dynamic range for a measurement by differentiating distances from a slit plate among adjacent microscopic diodes on which an ion beam passing a multislit plate is incident. CONSTITUTION:Sample ions 2 are dispersed in a magnetic field 1 according to a mass charge ratio, developed as spectra on a focusing surface P, incident on multidiodes 4 through a multisplit plate 3 provided with lined N number of slits S(S6-S238), converted into secondary electrons and detected with a multianode 6 after being amplified by a multichannel plate 5. Respective diodes 4 are fixed to an electrode B in such a way as each adjacent diode has a differ ent distance form the multislit plate 3. Then, each secondary electron is made incident in a different area of the multichannel plate 5. Thus, a saturation of the multichannel plate 5 is reduced, enabling a dynamic range to be expanded.
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